PURPOSE: To detect the presence of flaws positively and readily, by utilizing regular reflected light which is sufficiently higher than the light reflected by the surface of a body to be inspected, and detecting the edge part of the flaw.
CONSTITUTION: When parallel light is made to radiate on a body to be inspected 3 from a lighting device 1, the incident light is reflected by the surface of the body to be inspected 3. Said reflected light is inputted to a one dimensional image pickup device 2, and the surface image of the body to be inspected 3 is formed by a lens system. The reflected light, which is higher than the reflection by the surface of the body to be inspected 3, is detected based on the photoelectric output from the one dimensional image pickup device 2 by an edge detecting part 4. A flaw detecting part 5 detects the reflected light, which is lower than the level of the light reflected by the surface of the body to be inspected 3 and appears following the level of the high reflected light in a time series, based on the output of the edge detecting part 4.
KICHISE HIDEO
NISHIYAMA HIDEO
OOSAKI YOSHIHARU
