Title:
PLASMA METHOD FOR MANUFACTURING DIELECTRIC ROD
Document Type and Number:
Japanese Patent JPS5922654
Kind Code:
A
Abstract:
A plasma process for the production of a dielectric rod 6 from gaseous starting materials, causes the rod 6 to grow in the axial direction by deposition on its end face. This is effected by conducting microwave energy via the rod 6 to its end face, this energy maintaining a gaseous discharge 7 at the end face. The starting material flows into this gaseous discharge as a gaseous jet by means of a concentric nozzle system 8.
More Like This:
Inventors:
HANSU BEERUBUARUTO
GIYUNTAA BEEEMU
GIYUNTAA GUROMUSUKII
GIYUNTAA BEEEMU
GIYUNTAA GUROMUSUKII
Application Number:
JP8183383A
Publication Date:
February 04, 1984
Filing Date:
May 12, 1983
Export Citation:
Assignee:
JENAER GLASWERK SCHOTT & GEN
International Classes:
C03B8/04; H01J37/32; C03B19/00; C03B19/01; C03B19/14; C03B37/012; C03B37/014; C03B37/018; C03B37/025; C23C16/50; C23C16/511; H05H1/46; (IPC1-7): B01J19/08
Attorney, Agent or Firm:
Masaaki Yonehara