PURPOSE: To obtain a quick wafer changer by employing a triple transfer arm comprising three arms extending in three directions from the center of rotation and a wafer chuck provided at the tip of each arm.

CONSTITUTION: The wafer changer employs a triple transfer arm comprising three arms extending in three directions at an interval of 120° from the center of rotation and a wafer chuck provided at the tip of each arm. Three wafer chucks 32 are then rotary shifted to the wafer W feeding position, the wafer W changing position on a wafer disc 21, and the wafer W discharging position, sequentially. Furthermore, a wafer W is grasped by one wafer chuck 32 at the wafer feeding position and at the same time another wafer W on the wafer disc 21 is grasped by another wafer chuck at the wafer changing position. The wafer disc 21 is then rotated by 120° and the wafer W grasped by one wafer chuck 32 is fed to the wafer disc 21 at the wafer changing position while simultaneously another wafer W grasped by another wafer chuck 32 is discharged at charging position.