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Title:
【発明の名称】感光材料およびそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP2577980
Kind Code:
B2
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Inventors:
OGAWA KAZUFUMI
ENDO MASATAKA
OONO KEIJI
NAGOYA MAMORU
Application Number:
JP30577388A
Publication Date:
February 05, 1997
Filing Date:
December 02, 1988
Export Citation:
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Assignee:
MATSUSHITA DENKI SANGYO KK
WAKO JUNYAKU KOGYO KK
International Classes:
G03F7/004; C07C67/00; C07C241/00; C07C245/14; C07C309/46; C07C309/49; C07C309/76; C07C309/88; C07C311/16; C07C311/29; C07D295/22; G03F7/022; G03F7/039; (IPC1-7): G03F7/004; C07C245/14; C07C309/76; C07C311/16; C07D295/22; G03F7/039
Domestic Patent References:
JP63253938A
JP1106036A
JP1106044A
JP1152451A
JP180944A
Attorney, Agent or Firm:
Junji Hirai



 
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