Title:
WASHING APPARATUS AND METHOD HAVING DEFOAMING FUNCTION
Document Type and Number:
Japanese Patent JPH08905
Kind Code:
A
Abstract:
PURPOSE: To realize a washing apparatus and method having defoaming function capable of removing air bubbles in a washing soln.
CONSTITUTION: This washing apparatus consists of an overflow type washing tank and a circulating filter mechanism containing a filter and a defoaming device 11 and the defoaming device 11 is constituted by partially inserting a liquid inlet pipe 13 and an exhaust pipe 12 in the upper part of a hermetically closed container 12, and a liquid outlet pipe 15 is provided to the lower part of the container 12 and the leading end of the liquid inlet pipe 13 is closed, and a plurality of small holes 16 allowing a liquid to flow out are provided to the upper circumferential part of the pipe 13.
Inventors:
SHINOMIYA FUMIYOSHI
Application Number:
JP13712494A
Publication Date:
January 09, 1996
Filing Date:
June 20, 1994
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
B08B3/10; B01D19/00; H01L21/304; (IPC1-7): B01D19/00; B08B3/10; H01L21/304
Attorney, Agent or Firm:
Takashi Ishida (3 others)
Next Patent: DEGASSING DEVICE