Title:
【発明の名称】研磨粒子付着方法
Document Type and Number:
Japanese Patent JPS5921749
Kind Code:
B2
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Inventors:
JEI ROORENSU FURETSUCHAA
Application Number:
JP3008979A
Publication Date:
May 22, 1984
Filing Date:
March 16, 1979
Export Citation:
Assignee:
JEI ROORENSU FURETSUCHAA
International Classes:
C23F1/00; B24D3/06; B24D18/00; C25D15/00; (IPC1-7): B24D3/06
Attorney, Agent or Firm:
Narushima Mitsuo