Title:
【発明の名称】レジストおよびそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JPH07120043
Kind Code:
B2
Inventors:
Kazufumi Ogawa
Endo Masataka
Keiji Ohno
Mamoru Nagoya
Endo Masataka
Keiji Ohno
Mamoru Nagoya
Application Number:
JP31073687A
Publication Date:
December 20, 1995
Filing Date:
December 08, 1987
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
Wako Pure Chemical Industries, Ltd.
Wako Pure Chemical Industries, Ltd.
International Classes:
G03C1/72; C07C245/14; C07C309/88; C07D295/26; G03C5/16; G03F7/004; G03F7/016; G03F7/039; H01L21/027; (IPC1-7): G03F7/039; G03F7/004; H01L21/027
Domestic Patent References:
| JP1106044A | ||||
| JP1106034A | ||||
| JP133543A | ||||
| JP63220140A |
Attorney, Agent or Firm:
Junji Hirai