Title:
【発明の名称】多層被膜を有する真空容器及び真空機器用部品
Document Type and Number:
Japanese Patent JP2895554
Kind Code:
B2
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Inventors:
SAITO KAZUYA
ONOE KIMIMASA
TSUKAHARA SONOKO
INAYOSHI SAKAE
ONOE KIMIMASA
TSUKAHARA SONOKO
INAYOSHI SAKAE
Application Number:
JP4192990A
Publication Date:
May 24, 1999
Filing Date:
February 22, 1990
Export Citation:
Assignee:
NIPPON SHINKU GIJUTSU KK
International Classes:
B01J3/00; C23C14/06; C23C16/00; C23C16/30; C23C28/00; C23C28/02; (IPC1-7): C23C28/00; B01J3/00; C23C14/06; C23C16/30
Attorney, Agent or Firm:
Yasuo Iisaka