Title:
TARGET HOLDER
Document Type and Number:
Japanese Patent JPS5946750
Kind Code:
A
Abstract:
Target holder with mechanical scanning. The device comprises several target supports mounted on a plate, which rotates about an axis and means for displacing the supports relative to the plate, arranged in such a way that the radial displacement increment of a support between two consecutive passages in front of the beam is constant throughout the duration of a sweep between two end positions of the support. Application to ion implantation on a silicon wafer.
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Inventors:
MISHIERU BURUERU
JIYAN ESUKARON
JIYOSEFU RABARUTEINO
JIYAN ESUKARON
JIYOSEFU RABARUTEINO
Application Number:
JP11414683A
Publication Date:
March 16, 1984
Filing Date:
June 24, 1983
Export Citation:
Assignee:
COMMISSARIAT ENERGIE ATOMIQUE
International Classes:
H01J37/20; C23C14/50; H01J37/317; H01L21/265; H01L21/68; (IPC1-7): H01J37/20; H01J37/317; H01L21/265
Attorney, Agent or Firm:
Hideto Asamura