PURPOSE: To reduce cost for thin film formation and provide a heat-sensitive recording head at low price, by a method wherein a substrate for forming a heater and a substrate for multi-layer wiring are separated, and a ceramic substrate is provided to hold both substrates.

CONSTITUTION: A holding ceramic substrate 11 is used to hold a substrate 4 for heater and a substrate 8 for multi-layer wiring. Ceramic material with thermal expansion coefficient being equal or similar to that of the substrate 4 for heater is used in the ceramic substrate 11, thereby variation of flatness in the substrate 4 for heater is corrected easily. The substrate 8 for multi-layer wiring is manufactured in other process than that forming the heater and made of soft material.