Title:
PATTERN INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPS5922327
Kind Code:
A
Abstract:
PURPOSE:To enable to remove the measurement error of positional discrepancy detection, and to enable to perform pattern detection with high precision by a method wherein the radiating position of light to be offered for pattern detection and the radiating position of light to be offered for positional discrepancy detection are shifted relatively. CONSTITUTION:Reflected light from the inspecting face of a sample 21 is imaged on the light receiving face of the light receiving element 45 of an optical lens tube 24 through beam benders 43c, 43d and a lens 44b. Light emitted from a light emitting element 42 radiate the position 52 shifted a little from the irradiating region 51 of light radiated from a light source 22 at the inspecting face of the sample 21. Two outputs of the light receiving element 45 are supplied to a division circuit 48 through a reduction circuit 46 and an addition circuit 47 respectively. Output of the division circuit 48 thereof corresponds with up-and-down motion of the inspecting face of the sample 21 regardless of the variation of luminous intensity of the light emitting element 42 or the uniform variation of transmissivity or reflectivity of the optical element in the light path. Output of the reduction circuit 46 becomes to positive or negative, the optical lens tube 24 transfers in the upward and downward direction according to a driving circuit 32 through the division circuit 48, and discrepancy of the position of the inspecting face is corrected.
Inventors:
TOUJIYOU TOORU
SUGIHARA KAZUYOSHI
SUGIHARA KAZUYOSHI
Application Number:
JP13244182A
Publication Date:
February 04, 1984
Filing Date:
July 29, 1982
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01N21/88; G01N21/93; G01N21/956; G02B7/32; G03F1/00; H01L21/027; H01L21/66; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Noriyuki Noriyuki