Title:
MANUFACTURING DEVICE FOR AMORPHOUS SI SOLAR BATTERY
Document Type and Number:
Japanese Patent JPS60117683
Kind Code:
A
Abstract:
PURPOSE:To accurately control the quantity of B to be diffused vertically into a layer of amorphous Si by a method wherein a gas introducing means is provided in an I-layer forming tank and the means is capable of creating a gradient in diborane gas concentration and the gradient appears between the side near the P-layer forming tank and the side near an N-layer forming tank. CONSTITUTION:A B2H6 feed pipe 11 provided with several outlet holes 13 is housed in an I-layer forming tank 9 in the direction of the movement of a substrate 2. The outlet holes 13 are so arranged that the pitch between the holes 13 is less from the side near the N-layer forming tank 15 toward the P-layer forming tank 6. With the unit designed as such, in the process wherein an amorphous Si I-layer 32b is formed, the density of B in the I-layer 32b is continually less from the side near the P-layer 32a toward the side of the N-layer 32c. An Si solar battery is obtained excellent in performance characteristics both before and after exposure to light.
Inventors:
TANABE HIDEO
KUMADA SEIJI
SUNAHARA KAZUO
KAWASAKI HIROSHI
MISUMI AKIRA
KUMADA SEIJI
SUNAHARA KAZUO
KAWASAKI HIROSHI
MISUMI AKIRA
Application Number:
JP22411183A
Publication Date:
June 25, 1985
Filing Date:
November 30, 1983
Export Citation:
Assignee:
HITACHI LTD
HITACHI DEVICE ENG
HITACHI DEVICE ENG
International Classes:
C23C16/30; H01L31/04; H01L31/20; (IPC1-7): C23C16/24; H01L31/04
Attorney, Agent or Firm:
Akio Takahashi