Title:
【考案の名称】炉
Document Type and Number:
Japanese Patent JPS59124999
Kind Code:
U
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Inventors:
Tadahiko Yamanaka
Application Number:
JP2065183U
Publication Date:
August 22, 1984
Filing Date:
February 14, 1983
Export Citation:
International Classes:
F27D11/00; F27B9/24; F27D13/00; H01L21/18; H01L21/22; (IPC1-7): F27D13/00; F27B9/24; F27D11/00; H01L21/18