PURPOSE: To obtain a sensor which can detect a micro-magnetic field by forming a thin magnetic film superposed with two layers of different coercive forces on a non-magnetic substrate in a rectangular stripe shape by photolithographic techniques, forming a coil thereon and fetching outputs therefrom.
CONSTITUTION: Two layers of thin magnetic films 2, 3 differing in composition ratios of Fe-Ni-Co or Fe-Co-V are deposited on a glass substrate 1 by electron beam vapor deposition. The thin film 2, 3 differ in coercive force; the film 2 has smaller coercive force. The two layers thereof are etched by photolithographic techniques into a rectangular stripe shape. The films 4 serving electrical and magnetical insulators are deposited by sputtering on the films 2, 3. Further Mo films are formed by sputtering thereof and are dry etched to form a coil 5. With such constitution, the acute magnetization inversion of the soft films is detected with the pickup coil 5, whereby the micro-magnetic fields are detected.
| WO/2018/096862 | MAGNETIC SENSOR DEVICE |
| JPH0755061 | [Title of Invention] Inverter output voltage detection device |
| JP4865343 | Inspection method for iron-based structures |
OOTANI MITSUHIRO
SATOU TOMU
| JPS54128775A | 1979-10-05 | |||
| JPS5450372A | 1979-04-20 |