Title:
INSPECTING DEVICE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5817631
Kind Code:
A
Abstract:
PURPOSE:To improve the efficiency of an inspecting work by displaying by mapping respective circuit elements of a wafer on a scope of a displaying mechanism with a wafer probe for inspecting the electric characteristics of many circuit elements and indicating the propriety of the respective circuit elements on the map. CONSTITUTION:Circuit elements of a wafer 7 are drawn with blocks 8 as a map, as shown on a scope 6 of a displaying mechanism 5. This is displayed, for example, in combination with X-Y address signals of a drive mechanism and a measurement signal of a tester (measuring mechanism) 2 corresponding to the respective circuit elements, and improper circuit elements 9 are indicated as dark section with hatching in the drawing. According to this wafer probe, the measurement progress, and distribution and quantity of the defects can be instantaneously observed by visually observing the map on the scope 6. As a result, it can identify whether the probing is effectively performed or not.
Inventors:
CHIYOURI YOSHIAKI
Application Number:
JP11507881A
Publication Date:
February 01, 1983
Filing Date:
July 24, 1981
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/66; G01R31/316; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Toshiyuki Usuda