PURPOSE: To decrease the thermal deformation of the material to be worked by placing the material on a magnet chuck, disposing a magnetic material on the material, fixing the material and the magnetic material by magnetic force onto the chuck and cutting the material.
CONSTITUTION: An electrode unit 11 manufactured by joining a deflection electrode 1 and a grid electrode 4 by frit glass 3 of a joining spacer 2 is set to a magnet chuck 14 disposed on the X-Y table 6 of a laser working device. A magnetic material 16 such as silicon steel or the like of which only the cutting part is exposed is installed to the electrode 1 to be cut of the unit 11. The switch of the chuck 14 is turned on to attract the material 16 by the magnetic force of the magnet and to press the material 16 to the electrode 1, thereby fixing the unit 11 and the material 16 on the chuck 14. A laser beam 9 is irradiated in this state to cut the electrode 1.
KATAYAMA YOSHITAKA
KANAMARU TOSHIMI
YONEZAWA TAKETOSHI
