Title:
PHOTO DETECTOR
Document Type and Number:
Japanese Patent JPS59117277
Kind Code:
A
Abstract:
PURPOSE:To improve optical characteristics without deteriorating electric characteristics of a photo detector and to simplify manufacturing processes, by patterning a light sensitive resin thin film, performing dying with a black dye, thereby forming a shielding film having a high accuracy in dimensions. CONSTITUTION:A transparent protecting film 10 comprising a laminated structure of Si3N4 and the like is formed on a transparent conducting film 12 by a CVD method and the like. A resin, wherein about 5% of a light sensitive agent such as ammonium bichromate is mixed with a water soluble macromolecular resin such as gelatine, is applied to the thickness of 0.5-5mum. Thereafter, exposure and development are performed by a photographic method, and a water soluble macromolecular resin pattern 101 is formed. The pattern is immersed in a black dye, e.g. aqueous solution of Suminol black or the like, and a black organic film pattern is formed. Then, a macromolecular resin film 102 such polyglycidyl methacrylate is applied. Then an epoxy bonding agent 13 is applied on the substrate and bonded to a thin glass plate 14. Thus a closely adhered line sensor is completed.
Inventors:
SASANO AKIRA
NAKANO TOSHIO
TSUTSUI KEN
TSUKADA TOSHIHISA
TAJIRI TETSUO
OOTA HISAO
NAKANO TOSHIO
TSUTSUI KEN
TSUKADA TOSHIHISA
TAJIRI TETSUO
OOTA HISAO
Application Number:
JP22626182A
Publication Date:
July 06, 1984
Filing Date:
December 24, 1982
Export Citation:
Assignee:
HITACHI LTD
NIPPON TELEGRAPH & TELEPHONE
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01L27/146; H01L31/0216; H01L31/10; (IPC1-7): H01L31/10
Domestic Patent References:
| JPS55125685A | 1980-09-27 | |||
| JPS5627562A | 1981-03-17 |
Attorney, Agent or Firm:
Katsuo Ogawa