Title:
SEMICONDUCTOR MANUFACTURING OVEN
Document Type and Number:
Japanese Patent JPS5961931
Kind Code:
A
Abstract:
PURPOSE:To prevent welding of a pulling bar to a quartz tube by thermal deformation even under a high temperature and long time process by engaging the end point of pulling bar with a boat rotatably in the circumferential direction and by connecting the rear end thereof to a motor rotatably in the circumferential direction. CONSTITUTION:When a diving body 10 moves on a guide rail 12, a pulling bar 9 connected to a variable speed motor 11 moves forward and backward in the axial direction within the quartz tube 11 in parallel with the guide rail 12, pushing or pulling the boat 5 connected at the recessed groove 8 at the end thereof into or from the quartz tube 2. The recessed groove 8 of the pulling bar 9 is engaged with the erected wall at the end of boat 5. In such a structure, the boat 5 is pushed into the quartz tube 2 and thereby the pulling bar 9 rotates every slowly in the circumferential direction by a variable speed motor 11 during reaction, such as oxidation and diffusion under a high temperature. Accordingly, it is never deformed to one direction only., due to heat.
Inventors:
OKA NAOMASA
Application Number:
JP17278182A
Publication Date:
April 09, 1984
Filing Date:
September 30, 1982
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
H01L21/22; H01L21/31; (IPC1-7): C23C11/00; H01L21/22
Attorney, Agent or Firm:
Toshimaru Takemoto