Title:
TRANSFER APPARATUS AND TRANSFER METHOD
Document Type and Number:
Japanese Patent JP2014203890
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transfer apparatus and transfer method with which a possibility that a fork is in contact with a substrate to be transferred is detected with high accuracy.SOLUTION: A transfer apparatus 1 for transferring a substrate (eg. wafer) using a fork supporting the substrate comprises: an acceleration detection means 20a-20b attached on a place which is directly connected or indirectly connected to the fork, such as a prescribed part of a fork holder, a prescribed part of a transfer unit, and detecting an acceleration of the fork; and determination means 30 for determining that there is a possibility that the fork is in contact with the substrate when a detected acceleration of the driving fork exceeds an upper limit value. The transfer apparatus 1 preferably further comprises: filter means 30 for transmitting a frequency component of a prescribed frequency band in frequency components of detected acceleration, and determines that there is a possibility that the fork is in contact with the substrate when the acceleration after the frequency component of the prescribed frequency band is transmitted exceeds the upper limit value.
More Like This:
Inventors:
TOZAWA MASANORI
NARISAWA HIROKAZU
NAKANO SADAHARU
ISE MASAYUKI
NARISAWA HIROKAZU
NAKANO SADAHARU
ISE MASAYUKI
Application Number:
JP2013077000A
Publication Date:
October 27, 2014
Filing Date:
April 02, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashioka
Yoshiki Kuroki
Junji Kashioka