Title:
転写装置および転写方法
Document Type and Number:
Japanese Patent JP5860628
Kind Code:
B2
Inventors:
Yuta Kurosawa
Yoshiaki Sugishita
Yoshiaki Sugishita
Application Number:
JP2011167707A
Publication Date:
February 16, 2016
Filing Date:
July 29, 2011
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/301; H01L21/52
Domestic Patent References:
| JP2007109869A | ||||
| JP2005079453A | ||||
| JP8172061A | ||||
| JP2005039114A | ||||
| JP2006332078A | ||||
| JP2010206044A | ||||
| JP2012164953A | ||||
| JP2004288689A |
Attorney, Agent or Firm:
Intellectual Property Office