Title:
トランジスタアレイ及びその製造方法
Document Type and Number:
Japanese Patent JP6268189
Kind Code:
B2
Abstract:
The disclosure provides a transistor array including a substrate and a plurality of transistor elements sharing the substrate. Each of the transistor elements includes: a bottom electrode disposed on the substrate and a connection wire for the bottom electrode; a piezoelectric body disposed on the bottom electrode, wherein the piezoelectric body is made of piezoelectric material; and a top electrode disposed on the piezoelectric body. The disclosure also provides a method for manufacturing a transistor array. The transistor array contains transistor elements which are two-terminal devices. Piezoelectric bodies with piezoelectric properties are provided between the top electrodes and bottom electrodes of the transistor array. The carrier transport progress of the transistor elements in the transistor array device can be effectively regulated or triggered by strains or stresses applied on the transistor elements.
More Like This:
| JP2022094478 | ULTRASONIC ELEMENT AND ULTRASONIC DEVICE |
| JP2016085134 | VIBRATION TYPE ANGULAR VELOCITY SENSOR |
Inventors:
Wang Zhonglin
Takefumi
Wen Xiao Kusunoki
Takefumi
Wen Xiao Kusunoki
Application Number:
JP2015551961A
Publication Date:
January 24, 2018
Filing Date:
December 12, 2013
Export Citation:
Assignee:
Beijing Rice Delivery System Research Institute
International Classes:
H01L41/113; H01L41/187; H01L41/193; H01L41/23
Domestic Patent References:
| JP2007513504A | ||||
| JP2012531036A | ||||
| JP2012186471A | ||||
| JP2011211164A | ||||
| JP2010135741A |
Foreign References:
| US20120306319 | ||||
| US20050156362 | ||||
| WO2005054148A2 | ||||
| US20110010904 | ||||
| WO2010147675A1 | ||||
| US20120223617 | ||||
| EP2495777A2 | ||||
| US20110221306 |
Attorney, Agent or Firm:
Patent business corporation Tsukuni