Title:
TRANSMISSION ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP2001118535
Kind Code:
A
Abstract:
To obtain a transmission electron microscope which measures and indicates an amount and directions deviations in a visual field of a reference image recorded after an arbitrary set time relative to a recorded image in a real time and a high degree of accuracy and automatically corrects for the deviations in visual field.
A transmission electron microscope comprises a means for calculating an deviation amount in visual field among a plurality of sample permeation images, a means for changing an electric current given in a deflector for deflecting an electron beam or moving a sample to automatically correct the deviations in visual field, and a control means for repeating this operation means to decrease the deviations in the visual field.
Inventors:
INADA HIROMI
OTSUKA HISASHI
NAGAOKI ISAO
KOBAYASHI HIROYUKI
OTSUKA HISASHI
NAGAOKI ISAO
KOBAYASHI HIROYUKI
Application Number:
JP29624599A
Publication Date:
April 27, 2001
Filing Date:
October 19, 1999
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G06T1/00; H01J37/147; H01J37/22; (IPC1-7): H01J37/147; G06T1/00; H01J37/22
Attorney, Agent or Firm:
Sakuta Yasuo
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