Title:
TRANSMISSION TYPE ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP3876129
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To accurately set focusing position on an inclined axis, when taking a photograph in a transmission electron microscope provided with an expansion MDS function.
SOLUTION: A display control device 22 displays an image photographed by a TV camera 21, on a monitor 24 and makes a superimposed display of an inclined axis pattern on the monitor 24 on the basis of inclined axis information from an electron microscope body control part 30. When an operator instructs a point near the inclined axis of the inclined axis pattern by an input device 23, the display control device 22 sets a focusing position on the inclined axis J, which is closest in distance from the instructed point and informs the electron microscope body control part 30 of focusing position information. On the basis of the focusing position information, the electron microscope body control part 30 controls each part of an electron microscope body, so as to irradiate electron beams focused on the focusing position. Then the operator has only to focus and can take the photograph afterwards.
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Inventors:
Hideki Tezuka
Application Number:
JP2001082145A
Publication Date:
January 31, 2007
Filing Date:
March 22, 2001
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/21; H01J37/22; H01J37/26; (IPC1-7): H01J37/26; H01J37/21; H01J37/22
Domestic Patent References:
| JP2001057170A | ||||
| JP2001093458A | ||||
| JP2000100367A |
Attorney, Agent or Firm:
Hideo Sugai
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa
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