To provide a transparent conductive film having a high-resistivity, and excellent transparency, heat-resistance, and moisture-resistance.
The invention provides a transparent conductive film wherein the doping amount of nitrogen into an ITO film (indium oxide/tin oxide film) is 0.01-0.6 wt.%, the geometrical film thickness is 5-25 nm, and the transmittance of the light having a wavelength of 550 nm into the film is higher than 90%, the manufacturing method of the film, the substrate with the transparent conductive film coated with the film, and the touch panel loaded with the substrate. Or else, the invention provides the transparent conductive film wherein the doping ratio of the tin to the indium in the film is 4.2-8.3 atomic %, and the nitrogen is not included.
AKAO YASUHIKO
TAKAGI SATORU
HAYASHI YASUO
FUJIWARA AKIO
Next Patent: UNDERWATER CABLE