To obtain a manufacturing method of a transparent conductive film excellent in productivity and photoelectric conversion efficiency, a thin film solar cell using the transparent conductive film, a manufacturing method of the thin film solar cell and a thin film solar cell module.
A transparent conductive film manufacturing method in which a transparent conductive film is formed on an insulating substrate, comprises: a first process of roughening a formation target surface of the transparent conductive film on the insulating substrate by forming, on the formation target surface, a first convexoconcave shape satisfying a condition that center line average roughness is within a range of 1 nm-50 nm, and satisfying at least one of conditions that a convexoconcave pitch is not greater than 1.5 μm and that a maximum difference in height is not greater than 200 nm; and a second process of forming the transparent conductive film on the roughened formation target surface.
YAMABAYASHI HIROYA
MATSUURA TSUTOMU
MOTOTANI SO
