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Title:
TRANSPARENT CONDUCTIVE SUBSTRATE, PRODUCTION OF TRANSPARENT CONDUCTIVE SUBSTRATE AND DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP3515255
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To obtain a substrate having excellent heat resistance, optical characteristics, scratching resistance, oxygen and steam barrier property and adhesion property to electrode layer by depositing a silane coupling agent on the metal oxide layer or metal nitride layer on the front surface of a transparent composite base material and allowing the exposed surface of the metal oxide or metal nitride to exist.
SOLUTION: The metal oxide thin layers or metal nitride thin layers 121, 122 which are insufficient in compactness are formed on both surfaces of the heat resistance transparent base material 11. These layers are then impregnated with the silane coupling agents 161, 162 in order to seal their pore parts. thereby, the metal oxide thin layers or metal nitride thin layers 123, 124 made compact and tough are obtd. The surface of the one metal oxide thin layer or metal nitride thin layer 123 made compact and tough is provided with a polished surface 17 where the inorg. matter is exposed and smoothed by polishing, and a transparent electrode layer 15 is installed thereon. Thereby, the dense metal oxide thin layers or metal nitride thin layers 123, 124 are securely and tightly adhered, and the transparent electrode layer 15 can be provided on the surface where the metal compd. having a good fit to the inorg. matter is exposed.


Inventors:
Kajiura, Sadao
Hiraoka, Toshiro
Yoshizumi, Akira
Application Number:
JP32724895A
Publication Date:
April 05, 2004
Filing Date:
December 15, 1995
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G02F1/1333; B32B9/00; G09F9/30; H01B5/14; (IPC1-7): B32B9/00; G02F1/1333