PURPOSE: To reduce change in resistivity of electrically-conductive film when it is used at high temperature in various atmospheres, by adding a metallic element of group III to transparent electrically-conductive film of zinc oxide.
CONSTITUTION: One or more metallic elements of group III are added to a transparent electrically-conductive film comprising zinc oxide as a main compo nent. The content of the metal of group III is 1W20atom% based on zinc atom. B, Al, Se, Ga, Y, Tl, or In alone or two or more of them are added as the metal of group III to zinc oxide. Preferably the metal of group III is added to the raw material in the form of a metallic element, metallic oxide, organometallic compound, halide, etc., during film forming process. The transpar ent electrically-conductive film of zinc oxide has improved heat resistance, and the same electrical and optical characteristics as those of ITO film.
TAKADA SHINZO
NANTO HIDEHITO
JPS515360A | 1976-01-17 | |||
JPS5023918A | 1975-03-14 | |||
JPS4730840A |