Title:
TRANSPARENT ELECTRODE FILM
Document Type and Number:
Japanese Patent JP2004259549
Kind Code:
A
Abstract:
To provide a transparent electrode film strong against deterioration by moisture, and having acid resistance and alkaline resistance.
This transparent electrode is formed by covering the surface of the transparent electrode containing ZnO as a main material with a ZnO film with Mg added. Reliability degradation can be prevented even against moisture containing ions.
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Inventors:
NAKAHARA TAKESHI
Application Number:
JP2003048065A
Publication Date:
September 16, 2004
Filing Date:
February 25, 2003
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
B32B9/00; H01B5/14; H01L33/20; H01L33/32; H01L33/42; (IPC1-7): H01B5/14; H01L33/00
Domestic Patent References:
| JP2003037268A | 2003-02-07 | |||
| JPH10178195A | 1998-06-30 | |||
| JP2002111059A | 2002-04-12 | |||
| JP2002170993A | 2002-06-14 | |||
| JP2002280580A | 2002-09-27 |
Attorney, Agent or Firm:
Kenji Okada
Katsuhiro Imashita
Katsuhiro Imashita