Title:
TREATMENT LIQUID GENERATOR AND TREATMENT LIQUID GENERATION METHOD
Document Type and Number:
Japanese Patent JP2016010797
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a treatment liquid generator and a treatment liquid generation method capable of improving the oxidation capacity of a treating liquid.SOLUTION: Provided is a treatment liquid generator 10A comprising: the first and second tanks 109; a pair of the first and second electrodes 102, 104; the first and second plasma generators 120; and a controller 200. The controller generates plasma in the first time on the first plasma generator to generate the first treatment liquid in the first tank, and generates plasma in the second time lower than the first time to generate the second treatment liquid in the first tank. The initial oxidizing force of the first treatment liquid is longer than the initial oxidizing force of the second treatment liquid, and the duration oxidizing force of the second treatment liquid is higher than the duration oxidizing force of the first treatment liquid.
Inventors:
IMADA KATSUMI
MIYASHITA MARIKO
MIYAMOTO YOSHIKO
MIYASHITA MARIKO
MIYAMOTO YOSHIKO
Application Number:
JP2015096648A
Publication Date:
January 21, 2016
Filing Date:
May 11, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
C02F1/48; H05H1/24
Domestic Patent References:
| JPH09507428A | 1997-07-29 | |||
| JP2007207540A | 2007-08-16 | |||
| JP2005058886A | 2005-03-10 |
Foreign References:
| WO2014017020A1 | 2014-01-30 | |||
| WO2012157248A1 | 2012-11-22 | |||
| WO2010082561A1 | 2010-07-22 |
Attorney, Agent or Firm:
Seiji Okuda
Osamu Kita
Michi Kajitani
Akiko Miyake
Hidetaka Okabe
Tohru Kawakita
Yu Tanaka
Osamu Kita
Michi Kajitani
Akiko Miyake
Hidetaka Okabe
Tohru Kawakita
Yu Tanaka