Title:
TREATMENT SYSTEM
Document Type and Number:
Japanese Patent JP3851751
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a processing system in which system increasing and decreasing can be made dynamically and effectively.
SOLUTION: A treatment unit group 12, in which treatment units (CHP) 12a to 12j for both heating and cooling are provided on multi steps, is provided at the rear part of a side surface of processing stations 2a, 2b and 2c. Additionally a receiving and sending base 13 is provided at the central part of another side surface. Furthermore, a processing unit 14 and so on are provided at the upper part of the front side. A transfer device 15 having a vertical transfer system is provided at about the center. Since a plurality of the processing stations 2a, 2b and 2c having such a same constitution can be junctioned serially, a system increase and decrease can be made dynamically and effectively.
Inventors:
Kazushige Ueda
Application Number:
JP2000037271A
Publication Date:
November 29, 2006
Filing Date:
February 15, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; H01L21/677; B65G49/07; G03D5/00; H01L21/68; (IPC1-7): H01L21/68; B65G49/07; H01L21/027
Domestic Patent References:
| JP10144763A | ||||
| JP1074818A | ||||
| JP10247678A | ||||
| JP200021841A |
Attorney, Agent or Firm:
Junichi Omori
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