Title:
TREATMENT OF WASTE SOLUTION CONTAINING TETRAALKYLAMMONIUM HYDROXIDE
Document Type and Number:
Japanese Patent JP3392483
Kind Code:
B2
Abstract:
PURPOSE: To stably treat a waste soln. without clogging a reverse osmosis membrane by subjecting the org. matter in the waste soln. containing tetraalkylammonium hydroxide to oxidation treatment to convert the same to a monomeric substance or to decompose the same and supplying the treated soln. to the reverse osmosis membrane while neutralizing the same to separate the moisture in the waste soln.
CONSTITUTION: A waste developing soln. (pH; 12-14) containing tetraalkylammonium hydroxide is pressurized by a pump 4 to be sent to an oxidation treatment tank 5 from a waste soln. storage tank 1 to be subjected to oxidation treatment by an oxidizing agent generating device 2 or the oxidizing agent from an oxidizing agent storage tank. By this method, a photoresist or a sensitizer being a polymeric substance is converted to a monomeric substance by oxidative decomposition and a surfactant or other org. matter is decomposed. An acid is added to the waste soln. within a neutralization treatment device 6 from an acid storage tank 3 to adjust the pH of the waste soln. to 6-8 and the treated waste soln. is supplied to a reverse osmosis membrane 9 under pressure from a reverse osmosis circulating storage tank 7 by a high pressure pump 8 and transmitted water 10 is taken out while a concn. soln. is circulated to the reverse osmosis circulating storage tank.
Inventors:
Satoshi Niimi
Namie Higuchi
Namie Higuchi
Application Number:
JP28509993A
Publication Date:
March 31, 2003
Filing Date:
November 15, 1993
Export Citation:
Assignee:
Chlorine Engineers Co., Ltd.
International Classes:
B01D61/04; C02F1/44; C02F1/66; C02F1/78; C02F9/00; (IPC1-7): C02F1/44; B01D61/04; C02F1/66; C02F1/78; C02F9/00
Domestic Patent References:
JP63294989A | ||||
JP60118282A | ||||
JP5297597A | ||||
JP5291130A | ||||
JP5104095A | ||||
JP5169061A |
Attorney, Agent or Firm:
Akira Yonezawa (7 others)
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