Title:
TRIMMING METHOD FOR PRESSURE SWITCH AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3387532
Kind Code:
B2
Abstract:
PURPOSE: To provide the trimming method for a pressure switch with a good yield, which eliminates the need for making pressure measurement after trimming and eliminates a possibility of the trouble by excessive etching and the device therefor.
CONSTITUTION: The diaphragm part 11 of the pressure switch 5 fixed in a pressure chamber 8 to which the prescribed pressure corresponding to a detecting pressure is impressed is irradiated through a transmission window 4 with the excimer laser which is outputted from a laser beam oscillation section 1 and is converted to a prescribed spot diameter by a lens 2. The pressure switch 5 turns on when the diaphragm part 11 is etched down to the thickness corresponding to the detecting pressure of the pressure switch 5 by the laser beam with which this part is irradiated. The detection signal is then inputted from a probe pressed to a pad part 12 to a control unit 10, by which the oscillation of the laser beam is stopped.
Inventors:
Yoshifumi Yoshida
Application Number:
JP29018692A
Publication Date:
March 17, 2003
Filing Date:
October 28, 1992
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
B23K26/361; B23K26/00; B23K26/12; B23K26/351; C23F4/04; H01H35/34; (IPC1-7): C23F4/04; B23K26/00; H01H35/34
Domestic Patent References:
| JP1259231A | ||||
| JP1267914A | ||||
| JP6183005U |
Attorney, Agent or Firm:
Masaaki Sakaue
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