Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ULTRASONIC BONDING APPARATUS
Document Type and Number:
Japanese Patent JP2006086346
Kind Code:
A
Abstract:

To provide an ultrasonic bonding apparatus which can fix to a horn by a sufficient fixing force while it is a small and simple bonding tool fixing part and in which a bending vibration or the like is not excited for the bonding tool.

The other main surface of a component P in which a bump P1 is formed on one main surface thereof is adsorbed by an adsorption surface 35 of the bonding tool 30. A pressing force and an ultrasonic vibration are applied to the component P through the bonding tool 30 from a horn 10, and a bump P1 is bonded to the surface B to be bonded. A shaft 32 is formed in the back surface side of the absorption surface of the bonding tool 30. An attachment hole 23 which engages and holds the shaft 32 and a threaded hole 24 which intersects perpendicularly to this attachment hole are formed by intersecting perpendicularly with the hole 10 to the surface B to be bonded. A clamping screw 25 is engaged with the threaded hole 24, and the shaft 32 is pressed and fixed to the attachment hole 23.


Inventors:
HIGASHIYAMA YUZO
Application Number:
JP2004269750A
Publication Date:
March 30, 2006
Filing Date:
September 16, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MURATA MANUFACTURING CO
International Classes:
H01L21/60; H01L21/607
Domestic Patent References:
JP2004134426A2004-04-30
JP2001176932A2001-06-29
JP2004167435A2004-06-17
Attorney, Agent or Firm:
Hidetaka Tsutsui