Title:
超音波洗浄装置
Document Type and Number:
Japanese Patent JP4219580
Kind Code:
B2
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Inventors:
Junpei Okawara
Norihisa Takahashi
Yoshiaki Haga
Kenichi Mimori
Norihisa Takahashi
Yoshiaki Haga
Kenichi Mimori
Application Number:
JP2001245599A
Publication Date:
February 04, 2009
Filing Date:
August 13, 2001
Export Citation:
Assignee:
Kaijo Co., Ltd.
ALPS ELECTRIC CO.,LTD.
ALPS ELECTRIC CO.,LTD.
International Classes:
B08B3/12; G02F1/13; G02F1/1333; H01L21/304
Domestic Patent References:
| JP2000094325A | ||||
| JP2001198538A |
Attorney, Agent or Firm:
Koichi Fujii
Kojiro Yoda
Kojiro Yoda