To provide a vacuum deposition apparatus for obtaining a wire-grid polarizing plate in which the film thickness is stabilized and the optical properties of a metal are high, in a roll-to-roll system.
The vacuum deposition apparatus is used for manufacturing the wire-grid polarizing plate of a roll-to-roll system by depositing a metal on a base film 5 having lattice-shaped projected parts on its surface while the base film 5 is conveyed from an original roll 6 around which the base film 5 is wound in a roll form to a winding-up roll 8 via a conveyor roll 7. The vacuum deposition apparatus is equipped with: a vacuum tank accommodating the original roll 6, the conveyor roll 7 and the winding-up roll 8; a heating part 10 which is arranged in the vacuum tank and heats and evaporates a vapor deposition material 9; a refrigerating trap 11 for capturing gas in the vacuum tank; and a heat shielding plate 12 arranged between the heating part 10 and the refrigerating trap 11.
SAWADA FUJIO
JP2008116492A | 2008-05-22 | |||
JP2008009069A | 2008-01-17 | |||
JP2002070738A | 2002-03-08 | |||
JPH0182376U | 1989-06-01 | |||
JPS6251172U | 1987-03-30 | |||
JP2006077284A | 2006-03-23 |
WO2006126707A1 | 2006-11-30 |
Amada Masayuki