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Title:
VACUUM DEPOSITION APPARATUS
Document Type and Number:
Japanese Patent JP2010018828
Kind Code:
A
Abstract:

To provide a vacuum deposition apparatus for obtaining a wire-grid polarizing plate in which the film thickness is stabilized and the optical properties of a metal are high, in a roll-to-roll system.

The vacuum deposition apparatus is used for manufacturing the wire-grid polarizing plate of a roll-to-roll system by depositing a metal on a base film 5 having lattice-shaped projected parts on its surface while the base film 5 is conveyed from an original roll 6 around which the base film 5 is wound in a roll form to a winding-up roll 8 via a conveyor roll 7. The vacuum deposition apparatus is equipped with: a vacuum tank accommodating the original roll 6, the conveyor roll 7 and the winding-up roll 8; a heating part 10 which is arranged in the vacuum tank and heats and evaporates a vapor deposition material 9; a refrigerating trap 11 for capturing gas in the vacuum tank; and a heat shielding plate 12 arranged between the heating part 10 and the refrigerating trap 11.


Inventors:
SATO YUSUKE
SAWADA FUJIO
Application Number:
JP2008179092A
Publication Date:
January 28, 2010
Filing Date:
July 09, 2008
Export Citation:
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Assignee:
ASAHI KASEI E MATERIALS CORP
International Classes:
C23C14/24; G02B5/30
Domestic Patent References:
JP2008116492A2008-05-22
JP2008009069A2008-01-17
JP2002070738A2002-03-08
JPH0182376U1989-06-01
JPS6251172U1987-03-30
JP2006077284A2006-03-23
Foreign References:
WO2006126707A12006-11-30
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki