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Title:
真空乾燥の終点検知方法及び真空乾燥装置
Document Type and Number:
Japanese Patent JP6513379
Kind Code:
B2
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Inventors:
Yoshimoto Tsuyoshi
Yoichi Ohinata
Application Number:
JP2014246677A
Publication Date:
May 15, 2019
Filing Date:
December 05, 2014
Export Citation:
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Assignee:
ULVAC, Inc.
International Classes:
F26B25/00; F26B5/04; F26B5/06
Domestic Patent References:
JP2009156499A
Foreign References:
US20130192083
Attorney, Agent or Firm:
Seiryu Corporation



 
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