Title:
真空排気装置及びその運転方法
Document Type and Number:
Japanese Patent JP7424772
Kind Code:
B2
Abstract:
To provide a vacuum evacuation device which can make circuit components for absorbing regenerative voltage such as brake resistance unnecessary and an operation method thereof.SOLUTION: A vacuum evacuation device concerning one aspect of the present invention is equipped with: a first vacuum pump; a second vacuum pump; and a power supply part. The first vacuum pump comprises: a first pump body having a first motor; and a first drive circuit which drives the first motor. The second vacuum pump comprises: a second pump body having a second motor and connected with a rear stage of the first pump body; and a second drive circuit which drives the second motor. The power supply part comprises a conduction line which can electrically connect between the first drive circuit and the second drive circuit.SELECTED DRAWING: Figure 2
Inventors:
Kenji Machiya
Toshio Suzuki
Tomonari Tanaka
Kenji Hashimoto
Kimura Yasuhiro
Toshio Suzuki
Tomonari Tanaka
Kenji Hashimoto
Kimura Yasuhiro
Application Number:
JP2019152652A
Publication Date:
January 30, 2024
Filing Date:
August 23, 2019
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H02P3/18; H02P5/46
Domestic Patent References:
| JP2011069294A | ||||
| JP10248281A | ||||
| JP2011139620A | ||||
| JP2010110139A | ||||
| JP2011230040A | ||||
| JP2002064901A |
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office
Junichi Ohmori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino
Junichi Ohmori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino