Title:
長尺フィルムの真空成膜装置
Document Type and Number:
Japanese Patent JP6465011
Kind Code:
B2
Inventors:
Eisaburo Kanda
Hiroto Watanabe
Hiroto Watanabe
Application Number:
JP2015242857A
Publication Date:
February 06, 2019
Filing Date:
December 14, 2015
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C23C14/56; B65H27/00
Domestic Patent References:
| JP2015206069A | ||||
| JP2012026025A | ||||
| JP2012169358A | ||||
| JP2006043965A |
Attorney, Agent or Firm:
Noriyuki Tsujikawa