To provide a vacuum heat treating furnace having a function of agitating granule which can (1) readily perform batch processing of granule by small amount, (2) prevent scattering of the granule, (3) raise the treatment speed, (4) uniform the temperature distribution and quality of an object to be treated, and (5) allow the object to be treated to be readily inserted into a furnace.
The furnace comprises a vacuum vessel 1 whose inside can be exhausted, a hollow cylindrical treating vessel 3 which is accommodated in the vacuum vessel and accommodates therein an object 4 to be treated while having a filter 10 at a circulation port at one end surface in respect of the axial direction, a supporting device 6 which supports the treating vessel so as to rotate or swing centering on its axis, a drive shaft 8 which is detachably connected to one end surface, in respect of the axial direction, of the treating vessel through the vacuum vessel, and a driven shaft 9 which is detachably connected to the other end surface, in respect of the axial direction, of the treating vessel through the vacuum vessel and supplies a treating gas 19 to the treating vessel. Thus the object to be treated inside is subjected to heating treatment by rotating or swinging the treating vessel with the drive shaft while the treating gas is supplied to the treating vessel through the driven shaft.
OKINO HIROSHI
KAWASAKI NOBUYOSHI
ISHIKAWAJIMA IWAKUNI SEISAKUSH