Title:
VACUUM TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2023036155
Kind Code:
A
Abstract:
To provide a vacuum treatment apparatus not causing a film peeling from a boundary part with a tray every time when detaching a tray.SOLUTION: A vacuum treatment apparatus includes a rotation holder 7 that has a vertical rotation shaft in a treatment chamber and to which a tray for holding a substrate is mounted; and a transportation mechanism that carries in an out a tray 13 between the treatment chamber and a load lock chamber in a state parallel to the rotation shaft and in a vertical hung state. The tray is composed of a first tray 13a having a shield plate 31 on both sides the tray and a second tray 13b not having the shield plate 31 on both sides of the tray. The shield plate 31 is structured to overlap a part of an edge part of the second tray 13b.SELECTED DRAWING: Figure 3
Inventors:
NOZAWA NAOYUKI
TAKANAMI YUJI
SATO TATSUYA
TAKANAMI YUJI
SATO TATSUYA
Application Number:
JP2021143017A
Publication Date:
March 14, 2023
Filing Date:
September 02, 2021
Export Citation:
Assignee:
CANON ANELVA CORP
International Classes:
C23C14/50; H01L21/677
Attorney, Agent or Firm:
Iwata
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