Title:
真空処理装置
Document Type and Number:
Japanese Patent JP7360305
Kind Code:
B2
Abstract:
To provide a vacuum processing apparatus that does not require adjustment during assembly and enables high-precision assembly.SOLUTION: A vacuum processing apparatus has a hinge mechanism 4 for opening and closing an upper lid 5 on one side of a housing 1, and the upper lid 5 can be displaced in the vertical direction by a long hole hinge hole 7, a hinge shaft 6, and a spring mechanism 8 provided in the hinge mechanism 4. Since the hinge shaft 6 can be displaced in the vertical direction, it is not necessary to adjust the height of the hinge mechanism 4 during an assembly process. As a result, an assembly time can be shortened, and an increase in manufacturing cost can be suppressed.SELECTED DRAWING: Figure 3
Inventors:
Kazuyuki Hirozane
Application Number:
JP2019205132A
Publication Date:
October 12, 2023
Filing Date:
November 13, 2019
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01L21/3065; C23C16/44
Domestic Patent References:
| JP2017038002A | ||||
| JP2007250568A |
Foreign References:
| US6050446 |
Attorney, Agent or Firm:
Patent Attorney Corporation Daiichi International Patent Office