Title:
VACUUM PUMP AND CONTROL METHOD FOR VACUUM PUMP
Document Type and Number:
Japanese Patent JP2022167582
Kind Code:
A
Abstract:
To provide a vacuum pump that can shorten stopping time through stable operation.SOLUTION: A vacuum pump comprises a vacuum pump body, a load generation part, and a control part. The vacuum pump body comprises a rotor, and a motor. The motor drives the rotor. The load generation part can generate a load for decelerating the motor by being supplied with regenerative electric power of the motor. The control part performs control so that the regenerative electric power supplied to the load generation part is gradually increased.SELECTED DRAWING: Figure 5
Inventors:
HASHIMOTO TOSHIFUMI
Application Number:
JP2021073462A
Publication Date:
November 04, 2022
Filing Date:
April 23, 2021
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; F04C25/02; H02P6/24
Attorney, Agent or Firm:
Yamashita
Toshihisa Koga
Toshihisa Koga