真空ポンプ及び該真空ポンプの制御装置

Japanese Patent JP7244328

B2

The present invention provides a vacuum pump and a control apparatus of the vacuum pump which inexpensively realizes a structure that is less likely to be infiltrated by water droplets without using a sealing material and which is equipped with a structure that enables a pump main body and the control apparatus to be readily separated and enables maintenance to be readily performed. Water droplets having leaked from around a base portion 129 or the like infiltrate into a gap 220. In particular, the likelihood of infiltration by water droplets further increases when a lid 219 has been removed. In this case, while the water droplets are likely to flow into a depressed portion 200b, since a hollow plate-like portion 221a and the depressed portion 200b are hermetically fixed to each other by respective metal surfaces, water droplets are unlikely to infiltrate into the control apparatus 200. In addition, since the cylindrical member 221 penetrates the gap 220 and is formed higher than a thickness of the gap 220, water droplets that fill the gap 220 are prevented from infiltrating from inside the cylindrical member 221. Furthermore, even when water droplets land on an upper surface of a plate 150, since the cylindrical member 221 is provided so as to protrude higher than the upper surface of the plate 150, the water droplets are not likely to infiltrate beyond the cylindrical member 221.

Kengo Saegusa

JP2019063520A

March 22, 2023

March 28, 2019

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Edwards Co., Ltd.

F04D19/04; F04D29/70

JP2013100760A
JP2015048734A
JP2018066368A
JP2017002729A

WO2012053270A1

Masatoshi Shiina

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