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Patent Searching and Data


Title:
VACUUM PUMP ROTOR
Document Type and Number:
Japanese Patent JP2006291794
Kind Code:
A
Abstract:

To provide a low manufacturing cost vacuum pump rotor by performing high speed automatic working by press working in the rotor of a vacuum pump such as a compound molecular pump.

Rotor blade stages 2 are formed in a manner that two or more thin plate made rotor blade element circular plates 2c formed by radially projecting many moving rotor elements 2c1 in a peripheral part are laminated with their angles gradually shifted, and a turbo molecular pump part rotor 1A is formed by interposing spacer rings 3 between two or more moving blade stages 2. Further, a screw groove vacuum pump 1B having a first rotor 4 and a second rotor 5 is formed in a manner that bowl-shaped bodies 4a, 5a made of thin plates are projected under the turbo molecular pump rotor 1A and a cylindrical body 4b or 5b is engaged with and fixed to the peripheral parts of the bowl-shaped bodies 4a, 5a.


Inventors:
IGUCHI MASASHI
OBAYASHI TETSUO
Application Number:
JP2005111834A
Publication Date:
October 26, 2006
Filing Date:
April 08, 2005
Export Citation:
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Assignee:
OSAKA VACUUM LTD
International Classes:
F04D19/04
Domestic Patent References:
JPH074383A1995-01-10
JPH0861290A1996-03-08
JPS53110183A1978-09-26
JPS62152520A1987-07-07
JP2002285989A2002-10-03
Attorney, Agent or Firm:
Teruaki Koyama