To provide a low manufacturing cost vacuum pump rotor by performing high speed automatic working by press working in the rotor of a vacuum pump such as a compound molecular pump.
Rotor blade stages 2 are formed in a manner that two or more thin plate made rotor blade element circular plates 2c formed by radially projecting many moving rotor elements 2c1 in a peripheral part are laminated with their angles gradually shifted, and a turbo molecular pump part rotor 1A is formed by interposing spacer rings 3 between two or more moving blade stages 2. Further, a screw groove vacuum pump 1B having a first rotor 4 and a second rotor 5 is formed in a manner that bowl-shaped bodies 4a, 5a made of thin plates are projected under the turbo molecular pump rotor 1A and a cylindrical body 4b or 5b is engaged with and fixed to the peripheral parts of the bowl-shaped bodies 4a, 5a.
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OBAYASHI TETSUO
JPH074383A | 1995-01-10 | |||
JPH0861290A | 1996-03-08 | |||
JPS53110183A | 1978-09-26 | |||
JPS62152520A | 1987-07-07 | |||
JP2002285989A | 2002-10-03 |