Title:
VACUUM PUMP, SPACER AND CASING
Document Type and Number:
Japanese Patent JP2022183756
Kind Code:
A
Abstract:
To propose a vacuum pump, a spacer and a casing capable of suppressing influence of heat transferred from an exhausted device on a rotary blade, while reducing the labor and cost required for attachment to the exhausted device.SOLUTION: A vacuum pump 100 has a rotary blade 102 and a fixed blade 123 alternately arranged in multiple stages in an axial direction inside a casing 127 having a suction port 101, and comprises heat transfer suppression means of suppressing heat on the suction port 101 side from being transferred from the casing 127 to the fixed blade 123.SELECTED DRAWING: Figure 1
Inventors:
SUZUKI HARUKI
Application Number:
JP2021091234A
Publication Date:
December 13, 2022
Filing Date:
May 31, 2021
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04
Attorney, Agent or Firm:
Yoshihiro Uemura
Hiroko Negishi
Hiroko Negishi