Title:
VACUUM PUMP SYSTEM
Document Type and Number:
Japanese Patent JP2023026633
Kind Code:
A
Abstract:
To accurately estimate an accumulation state of deposit.SOLUTION: A vacuum pump includes: a vacuum meter 110 for detecting gas pressure in a gas flow passage through which a gas taken from a suction port flows to an exhaust port 65; and an estimation unit 24 for estimating a state of deposit accumulated in the gas flow passage on the basis of the gas pressure detected by the vacuum meter 110.SELECTED DRAWING: Figure 2
Inventors:
Kimura Hiroaki
Application Number:
JP2023000687A
Publication Date:
February 24, 2023
Filing Date:
January 05, 2023
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04; F04D27/00
Attorney, Agent or Firm:
Koji Akutsu
Akira Senoo Exhibition
Masayuki Kishimoto
Hiroyuki Eguchi
Akira Senoo Exhibition
Masayuki Kishimoto
Hiroyuki Eguchi