To efficiently reduce heat radiated from a vacuum pump to the vacuum device side.
A heat exchanger having a plate-shaped heat shielding member having an inclined face not parallel to both the axis of the vacuum pump and an intake opening surface, is arranged in an upper area of a rotary blade and a fixed blade (a blade) on the intake port side of the vacuum pump, and a net-shaped heat shielding member supported by the heat exchanger is also arranged in an upper area on the intake port side of the vacuum pump. A cooling mechanism of contacting with the heat exchanger is arranged on the outer periphery of the heat exchanger. The net-shaped heat shielding member is molded by a mesh of the opening ratio being low in a central part having a diameter equal to an intake port side end surface area of a rotor of the vacuum pump, and is molded by a mesh of the opening ratio being high in an area (an area for arranging the rotary blade and the fixed blade) for enclosing the periphery of the central part, so that the heat radiated to the vacuum device side can be efficiently reduced while restraining reduction in exhaust performance of a gas transfer mechanism of the vacuum pump.
SAKAGUCHI YUKO
OTACHI YOSHINOBU
MAEJIMA YASUSHI
TAKAADA TSUTOMU
| JP2005207275A | 2005-08-04 | |||
| JPH11247790A | 1999-09-14 | |||
| JPH025792A | 1990-01-10 | |||
| JP2010112202A | 2010-05-20 | |||
| JP2005337071A | 2005-12-08 | |||
| JP2000009088A | 2000-01-11 | |||
| JP2005207275A | 2005-08-04 | |||
| JPH11247790A | 1999-09-14 |
Takashi Kawai