Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP4671624
Kind Code:
B2
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Inventors:
Takeshi Kabazawa
Manabu Nonaka
Manabu Nonaka
Application Number:
JP2004155060A
Publication Date:
April 20, 2011
Filing Date:
May 25, 2004
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F04B37/16; F04D29/58
Domestic Patent References:
| JP2001193686A | ||||
| JP3034699U | ||||
| JP2000161286A | ||||
| JP11247790A |
Attorney, Agent or Firm:
Takashi Kawai
Hitoshi Nakano
Hitoshi Nakano