Title:
VACUUM SUCTION DEVICE
Document Type and Number:
Japanese Patent JP2007021644
Kind Code:
A
Abstract:
To provide a vacuum suction device which can easily set its suction port on the suction surface of an object.
The vacuum suction device for solving the problem comprises a vacuum suction tube 1, a suction port 2 provided on one end of the vacuum suction tube, and a light source 4 for radiating a light beam outward from the vacuum suction tube via the suction port.
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Inventors:
ASADA NORIHIRO
Application Number:
JP2005206816A
Publication Date:
February 01, 2007
Filing Date:
July 15, 2005
Export Citation:
Assignee:
MICRO PREC KK
International Classes:
B25J15/06; H01L21/677
Attorney, Agent or Firm:
Hiroyuki Niwa
Tadao Noguchi
Tadao Noguchi