Title:
真空システムのサーボ弁
Document Type and Number:
Japanese Patent JP2006528330
Kind Code:
A
Abstract:
The invention provides a servo valve which is operable in vacuum systems and can be switched between an open and a closed state even by use of low forces. For that purpose, the valve has a closure member (4) moving between the open and a closed position under influence of a difference between a control pressure of a control chamber (13) and the pressures of the intake (2) and outlet (3), respectively. The control chamber is in constant fluid communication with the intake, and in adjustable fluid communication with the outlet to influence the control pressure mainly by the intake pressure and the outlet pressure depending on the adjustable fluid communication. The invention further provides a vacuum system with such a servo valve.
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Inventors:
Hans Kurt Petersen
Application Number:
JP2006529639A
Publication Date:
December 14, 2006
Filing Date:
May 24, 2004
Export Citation:
Assignee:
Danfoss acty cell scab
International Classes:
F16K1/00; F16K31/124; F16K31/40; F16K51/02
Domestic Patent References:
| JPH0751880A | 1995-02-28 | |||
| JPH09178022A | 1997-07-11 | |||
| JPH02109079U | 1990-08-30 | |||
| JPS63182381U | 1988-11-24 | |||
| JPS6348083U | 1988-04-01 | |||
| JPH0741173U | 1995-07-21 | |||
| JP2001343081A | 2001-12-14 | |||
| JP2001227670A | 2001-08-24 | |||
| JPS5618480U | 1981-02-18 |
Foreign References:
| GB721496A | 1955-01-05 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa